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Measuring Motions of MEMS

Published online by Cambridge University Press:  31 January 2011

Dennis M. Freeman
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Extract

Testing microelectromechanical systems (MEMS) includes testing a variety of electrical and mechanical signals. While powerful tools are available to test the electrical behavior of microfabricated systems, relatively few tools are available to measure micromechanical behavior.

Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 305 - 306
Copyright
Copyright © Materials Research Society 2001

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