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Published online by Cambridge University Press: 29 November 2013
In the second of this two-part series for the MRS Bulletin, we present the most commonly used tools for the quantitative determination of structure and chemistry in thin films. The physics of thin films is at a stage during which one encounters phenomena that have a fragile dependence on the structure and chemical properties of the interface; the field, therefore, is at a stage during which quantitiative structural and chemical determination at the atomic level is a must. It is the purpose of the December and January issues of the Bulletin to provide a start for researchers interested in the field. Of course, even during the writing of these articles new techniques are being invented and it is therefore impossible to provide a comprehensive review of all techniques being used these days.