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Silicon based On-chip Sub-Wavelength Grating Ring and Racetrack Resonator BioSensors

Published online by Cambridge University Press:  05 January 2017

Hai Yan
Affiliation:
Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, TX 78758, USA
Lijun Huang
Affiliation:
State Key Laboratory of Information Photonics and Optical Communications, School of Information and Communication Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China
Xiaochuan Xu*
Affiliation:
Omega Optics Inc., 8500 Shoal Creek Blvd., Bldg. 4, Suite 200, Austin, TX, 78757, USA
Naimei Tang
Affiliation:
Omega Optics Inc., 8500 Shoal Creek Blvd., Bldg. 4, Suite 200, Austin, TX, 78757, USA
Swapnajit Chakravarty
Affiliation:
Omega Optics Inc., 8500 Shoal Creek Blvd., Bldg. 4, Suite 200, Austin, TX, 78757, USA
Huiping Tian
Affiliation:
State Key Laboratory of Information Photonics and Optical Communications, School of Information and Communication Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China
Ray T. Chen*
Affiliation:
Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, TX 78758, USA Omega Optics Inc., 8500 Shoal Creek Blvd., Bldg. 4, Suite 200, Austin, TX, 78757, USA
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Abstract

In this paper, we experimentally study the unique surface sensing property and enhanced sensitivity in subwavelength grating (SWG) based microring resonator biosensors versus conventional ring resonator biosensors. In contrast to a conventional ring, the effective sensing region in the SWG microring resonator includes not only the top and side of the waveguide, but also the space between the silicon pillars on the propagation path of the optical mode. It leads to an unique property of thickness-independent surface sensitivity versus common evanescent wave sensors; in other words, the surface sensitivity remains constantly high with progressive attachment of biomolecules to the sensor surface. To increase the robustness of performance of ring shaped circular SWG biosensors, we experimentally demonstrate silicon SWG racetrack resonators. A quality factor of 9800 and bulk sensitivity (S) is ∼429.7 nm/RIU (refractive index per unit) results in an intrinsic detection limit (iDL) 3.71×10-4 RIU in racetrack SWG biosensors while still retaining the accumulated surface thickness properties of circular rings.

Type
Articles
Copyright
Copyright © Materials Research Society 2017 

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Footnotes

These authors contributed equally to this paper.

References

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