Skip to main content Accessibility help
×
Home
Hostname: page-component-564cf476b6-qq8pn Total loading time: 0.237 Render date: 2021-06-22T02:40:04.757Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true }

Article contents

Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration

Published online by Cambridge University Press:  10 May 2016

J.F. Michaud
Affiliation:
Université François Rabelais, Tours, GREMAN, CNRS-UMR 7347, 16 rue Pierre et Marie Curie, BP 7155, 37071 Tours Cedex 2, France
R. Khazaka
Affiliation:
Université François Rabelais, Tours, GREMAN, CNRS-UMR 7347, 16 rue Pierre et Marie Curie, BP 7155, 37071 Tours Cedex 2, France CRHEA, CNRS-UPR10, rue Bernard Gregory, 06560 Valbonne, France
M. Portail
Affiliation:
CRHEA, CNRS-UPR10, rue Bernard Gregory, 06560 Valbonne, France
G. Andrä
Affiliation:
Leibniz Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany
J. Bergmann
Affiliation:
Leibniz Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany
D. Alquier
Affiliation:
Université François Rabelais, Tours, GREMAN, CNRS-UMR 7347, 16 rue Pierre et Marie Curie, BP 7155, 37071 Tours Cedex 2, France
Corresponding
Get access

Abstract

The cubic polytype of silicon carbide is a stimulating candidate for Micro-Electro-Mechanical-Systems (MEMS) applications due to its interesting physical and chemical properties. Recently, we demonstrated the possibility to elaborate 3C-SiC membranes on 3C-SiC pseudo-substrates, using a silicon epilayer grown by Low Pressure Chemical Vapor Deposition as a sacrificial layer. Such structures could be the starting point for the elaboration of new MEMS devices. However, the roughness still represents a major concern. Therefore, in this contribution, we investigate the influence of an excimer laser irradiation on the Si epilayer surface prior to the 3C-SiC epilayer growth. We compare these results with the 3C-SiC epilayer grown directly on the as-grown Si epilayer.

Type
Articles
Copyright
Copyright © Materials Research Society 2016 

Access options

Get access to the full version of this content by using one of the access options below.

References

Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) for Harsh Environments, edited by Cheung, R., Imperial College Press, 2006.
Zorman, C.A. and Parro, R.J., Physica Status Solidi (b) 245(7), 1404 (2008).CrossRef
Michaud, J.F., Portail, M. and Alquier, D., 3C-SiC: from electronic to MEMS devices in Advanced Silicon Carbide Devices and Processing, Edited by Stephen, E. Saddow and Francesco La Via, InTech (2015).Google Scholar
Mehregany, M. and Zorman, C.A., Thin Solid Films 355-356, 518 (1999).
Sarro, P.M., Sensors and Actuators 82, 210 (2000).CrossRef
Daulton, T., Bernatowicz, T., Lewis, R., Messenger, S., Stadermann, F. and Amari, S., Science 296 (2002) 1852.CrossRef
Song, X., Michaud, J.F., Cayrel, F., Zielinski, M., Portail, M., Chassagne, T., Collard, E. and Alquier, D., Applied Physics Letters 96, 142104 (2010).CrossRef
Jiang, L. and Cheung, R., International Journal of Computational Materials Science and Surface Engineering 2(3-4), 225 (2009).
Mastropaolo, E. and Cheung, R., Materials Science Forum 711, 43 (2011).CrossRef
Boubekri, R., Cambril, E., Couraud, L., Bernardi, L., Madouri, A., Portail, M., Chassagne, T., Moisson, C., Zielinski, M., Jiao, S., Michaud, J.-F., Alquier, D., Bouloc, J., Nony, L., Bocquet, F., Loppacher, C., Martrou, D. and Gauthier, S., Journal of Applied Physics 116, 054304 (2014).CrossRef
Saddow, S. E., Silicon carbide biotechnology: a biocompatible semiconductor for advanced biomedical devices and applications. Elsevier Science (2011).
Khazaka, R., Portail, M., Vennéguès, P., Alquier, D. and Michaud, J.F., Acta Materialia 98, 336 (2015).CrossRef
Khazaka, R., Grundmann, M., Portail, M., Vennéguès, P., Zielinski, M., Chassagne, T., Alquier, D., Michaud, J.F, Applied Physics Letters 108, 011608 (2016).CrossRef
Michaud, J.F., Portail, M., Chassagne, T., Zielinski, M. and Alquier, D., Microelectronic Engineering 105, 65 (2013).CrossRef
Khazaka, R., Bahette, E., Portail, M., Alquier, D. and Michaud, J.F., Materials Letters 160, 28 (2015).CrossRef
Sinh, N.D., Andrä, G., Falk, F., Ose, E., Bergmann, J., Solar Energy Materials and Solar Cells 74, 295 (2002).CrossRef

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *