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A Silicon Multi-Cathode Detector For Microanalysis Applications
Published online by Cambridge University Press: 14 March 2018
Extract
A new class of silicon multi-cathode detector (SMCD) has been developed for microanaiysis spectrometry applications. The detector has excellent energy resolution (< 150 eV FWHM) and high count rate capability (>1 Mcps). An energy resolution of 143 eV FWHM at 5.9 keV was measured with the SMCD at 6 μs peaking time.
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- Copyright © Microscopy Society of America 2003