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Quick Sample Preparation and EFTEM Elemental Characterization of FAB Based Defects

Published online by Cambridge University Press:  14 March 2018

C.T. Schamp ,
B.T. Valdez  and
J. Gazda
C.T. Schamp*
Affiliation:
Cerium Labs, †5204 E. Ben White Blvd., M/S 512 Austin, TX 78741
B.T. Valdez
Affiliation:
Cerium Labs, †5204 E. Ben White Blvd., M/S 512 Austin, TX 78741
J. Gazda
Affiliation:
Cerium Labs, †5204 E. Ben White Blvd., M/S 512 Austin, TX 78741
*
tom.schamp@ceriumlabs.com

Extract

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A purpose of microscopy is to magnify and enhance contrast between different regions of a sample, whether those regions may be different structures, different orientations of the same structure, regions of different atomic weight, or different chemistries. In the present case, elemental mapping in the energy filtered transmission electron microscope (EFTEM) is used to enhance contrast between elements in an apparent bundle of fibers previously seen through scanning electron microscopy (SEM) and a particle that appears to be a catalytic source for the fibers.

Type
Research Article
Information
Microscopy Today , Volume 16 , Issue 3 , May 2008 , pp. 52 - 53
Copyright
Copyright © Microscopy Society of America 2008

Footnotes

†

CeriumLabs is a trademark of Spansion, LLC.

References

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[2] Giannuzzi, L.A. et al., “Ion-Solid Interactions”, in Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques, and Practice, Giannuzzi, L.A., Stevie, F.A. (eds), Springer-Verlag New York, 201 (2004).Google Scholar
[3] Edgerton, R.F, Electron Energy-Loss Spectroscopy in the Electron Microscopy, 2nd ed., Plenum Press, New York, 1996 Google Scholar