Energy filtered convergent beam electron diffraction was used to investigate localized strain in aluminum interconnects. By analyzing the position of higher order Laue zone lines, it is possible to measure the three-dimensional lattice strain with high accuracy (∼10−4) and high spatial resolution (10 to 100 nm). In the present article, important details of the strain analysis procedure are outlined. Subsequently, results of measurements of the local variation of thermal strains in narrow, free-standing interconnects are presented. The strain development in single grains during thermal cycling between −170°C and +100°C was measured in situ and local stress variations along the interconnect were investigated. The interconnects show reversible elastic behavior over the whole temperature range, leading to large stresses at low temperatures. The strain state varies locally within single grains, as well as from grain to grain, by as much as 50% in both types of samples. By comparing the experimental findings with elastic finite element modeling, a detailed understanding of the triaxial strain state could be achieved.

A new single-tilt technique for performing TEM stereomicroscopy of strain fields in crystalline materials has been developed. The technique is a weak beam technique that involves changing the value of g and/or sg while tilting across a set of Kikuchi bands. The primary benefit of the technique is it can be used with single-tilt TEM specimen holders including many specialty holders such as in situ straining, heating, and cooling holders. Standard stereo-TEM techniques are almost always limited to holders allowing two degrees of rotational freedom (i.e., double-tilt or tilt/rotation holders). An additional benefit of the new technique is that it eliminates the need to focus with the specimen height control. These advantages make it useful for stereo viewing or for quantitative stereomicroscopy provided necessary consideration is given to errors that may result from the technique.

We have used fluctuation microscopy to reveal the presence of structural order on length scales of 1–2 nm in metallic glasses. We compare results of fluctuation microscopy measurements with high resolution transmission electron microscopy and electron diffraction observations on a series of metallic glass samples with differing degrees of structural order. The agreement between the fluctuation microscopy results and those of the other techniques is good. In particular, we show that the technique used to make thin specimens for electron microscopy affects the structure of the metallic glass, with ion thinning inducing more structural order than electropolishing. We also show that relatively minor changes in the composition of the alloy can have a significant effect on the medium-range order; this increased order is correlated with changes in mechanical behavior.

The outer surfaces of three microorganisms, Giardia lamblia, Enterococcus faecalis, and Proteus mirabilis, were investigated by cryo-immobilization followed by sublimation of extracellular ice and cryocoating with either Pt alone or Pt plus carbon. Cryocoated samples were examined at −125°C in either an in-lens field emission SEM or a below-the-lens field emission SEM. Cryocoating with Pt alone was sufficient for low magnification observation, but attempts to do high-resolution imaging resulted in radiolysis and cracking of the specimen surface. Double coating with Pt and carbon, in combination with high resolution backscatter electron detectors, enabled high-resolution imaging of the glycocalyx of bacteria, revealing a sponge-like network over the surface. High resolution examination of bacterial flagella also revealed a periodic substructure. Common artifacts included radiolysis leading to “cracking” of the surface, and insufficient deposition of Pt resulting in the absence of detectable surface topography.

High-pressure frozen rat pancreas tissue samples were cryo-fractured and cryo-sectioned with a diamond knife in the microtome of a freeze-etching device. The bulk fracture faces and block faces were investigated in the frozen-hydrated state by use of a cryo-stage in an in-lens SEM. With this combination, relevant biological structures can be investigated with a few nanometers resolution in a near lifelike state, preventing the artifacts of conventional fixation techniques. Compared to TEM replica techniques, the presented method is more versatile since no replica cleaning is necessary. Additional structures can be made visible by controlled sublimation of ice, leading to a better understanding of the three-dimensional organization of organelles, such as the endoplasmic reticulum.

In this article, we show that nanometer-sized precipitates of atomic numbers higher than those of the surrounding crystalline matrix can be clearly revealed in a conventional transmission electron microscope by high-angle, centered dark-field imaging after minimizing the diffraction contrast. The effect is similar to that of Z-contrast STEM, albeit with a spatial resolution limited to 1 nm. Its sensitivity to atomic number differences between precipitates and matrix is about 10, which is demonstrated for precipitates formed after Er, Ge, Cr, and Si ion implantation into SiC.

We investigate cases where one can argue that sufficient conditions exist for Direct Methods to work with swift electrons. In addition to simple cases where kinematical scattering holds (e.g., surfaces in plan view), we identify three other configurations: (a) when 1s channeling holds and kinematical scattering is statistically correct; (b) when there is a mapping from kinematical to dynamical intensities that preserves the order of the intensities, for instance with powder or precession data, and (c) when the scattering is dominated by one type of atom. We also briefly discuss the possibility of using Direct Methods to restore the complex exit wave leaving a sample in the most general case.

In this article, we report a technique for growing carbon nanotubes in a more controllable fashion, which enables us to synthesize nanotubes directly in various forms of designed patterns. This nanofabrication process is based on a combination of focused ion beam (FIB) and chemical vapor deposition (CVD) techniques. In this process, arrays of conductive patterns were first deposited on silicon substrates by directing a gaseous compound (C9H16Pt) via the capillary needle-sized nozzles within a FIB system. The substrates were then coated with catalyst and further modified by the FIB to localize the position of the catalyst. Finally, the growth of carbon nanotubes on the designed substrates was carried out by CVD of hydrocarbon gases. This fabrication technique has the advantage of positioning carbon nanotubes in selected locations. This may open up opportunities for the direct synthesis of carbon nanotubes onto almost any substrate material, thus allowing fabrication of carbon nanotube-based devices.

We present high-precision measurements of pure element stable isotope pairs that demonstrate mass has no influence on the backscattering of electrons at typical electron microprobe energies. The traditional prediction of average backscatter intensities in compounds was pragmatically based on elemental mass fractions. Our isotopic measurements establish that this approximation has no physical basis. We propose an alternative model to mass fraction averaging, based on the number of electrons or protons, termed “electron fraction,” which predicts backscatter yield better than mass fraction averaging. We also present an improved backscatter (electron loss) factor based on a modified electron fraction average for the ZAF atomic number correction that provides a significant analytical improvement, especially where large atomic number corrections are required.

Cathodoluminescence (CL) spectra from silicon doped and undoped wurtzite n-type GaN have been measured in a SEM under a wide range of electron beam excitation conditions, which include accelerating voltage, beam current, magnification, beam diameter, and specimen temperature. The CL intensity dependence on excitation density was analyzed using a power-law model (ICL ∝ Jm) for each of the observed CL bands in this material. The yellow luminescence band present in both silicon and undoped GaN exhibits a close to cube root (m = 0.33) dependence on electron beam excitation at both 77 K and 300 K. However, the blue (at 300 K) and donor-acceptor pair (at 77 K) emission peaks observed in undoped GaN follow power laws with exponents of m = 1 and m = 0.5, respectively. As expected from its excitonic character, the near band edge emission intensity depends linearly (m = 1) in silicon doped GaN and superlinearly (m = 1.2) in undoped GaN on the electron beam current. Results show that the intensities of the CL bands are highly dependent not only on the defect concentration but also on the electron-hole pair density and injection rate. Furthermore, the size of the focussed electron beam was found to have a considerable effect on the relative intensities of the CL emission peaks. Hence SEM parameters such as the objective lens aperture size, astigmatism, and the condenser lens setting must also be considered when assessing CL data based on intensity measurements from this material.

Ionization of atoms is the first step in many analytical procedures. The cross section for ionizing a particular atomic shell is essential for calculating the magnitude of analytical signals. Calculations using atomic wave functions for various shells of all elements relevant for X-ray microanalysis over a range of electron energies up to 400 keV were performed. The calculations for high energies above threshold can be considerably simplified by using the mathematical form of the Bethe ridge that dominates the scattering in this region. Corrections for exchange at low energies above threshold are incorporated in these calculations. A selection of results showing the effects of different approximations on ionization cross sections for K, L, and M shells is presented.

The micro- and nanoarchitectures of water-swollen hydrogels were routinely analyzed in three dimensions at very high resolution by two cryopreparation methods that provide stable low-temperature specimens for in-lens high magnification recordings. Gemini surfactants (gS), poly-N-isopropylacrylamides (p-NIP Am), and elastin-mimetic di- (db-E) and triblock (tb-E) copolymer proteins that form hydrogels have been routinely analyzed to the sub-10-nm level in a single day. After they were quench or high pressure frozen, samples in bulk planchets were subsequently chromium coated and observed at low temperature in an in-lens field emission SEM. Pre-equilibrated planchets (4–40°C) that hold 5–10 μl of hydrogel facilitate dynamic morphological studies above and below their transition temperatures. Rapidly frozen samples were fractured under liquid nitrogen, low-temperature metal coated, and observed in-lens to assess the dispersion characteristics of micelles and fragile colloidal assemblies within bulk frozen water. Utilizing the same planchet freezing system, the cryoetch-HRSEM technique removed bulk frozen water from the hydrogel matrix by low-temperature, high-vacuum sublimation. The remaining frozen solid-state sample faithfully represented the hydrogel matrix. Cryo- and cryoetch-HRSEM provided vast vistas of hydrogels at low and intermediate magnifications whereas high magnification recordings and anaglyphs (stereo images) provided a three-dimensional prospective and measurements on a molecular level.

This article reports on the use of high pressure freezing followed by freeze substitution (HPF/FS) to study ultrastructural details of host–pathogen interactions in fungal diseases of plants. The specific host–pathogen systems discussed here include a powdery mildew infection of poinsettia and rust infections of daylily and Indian strawberry. The three pathogens considered here all attack the leaves of their hosts and produce specialized hyphal branches known as haustoria that invade individual host cells without killing them. We found that HPF/FS provided excellent preservation of both haustoria and host cells for all three host–pathogen systems. Preservation of fungal and host cell membranes was particularly good and greatly facilitated the detailed study of host–pathogen interfaces. In some instances, HPF/FS provided information that was not available in samples prepared for study using conventional chemical fixation. On the other hand, we did encounter various problems associated with the use of HPF/FS. Examples included freeze damage of samples, inconsistency of fixation in different samples, separation of plant cell cytoplasm from cell walls, breakage of cell walls and membranes, and splitting of thin sections. However, we believe that the outstanding preservation of ultrastructural details afforded by HPF/FS significantly outweighs these problems and we highly recommend the use of this fixation protocol for future studies of fungal host-plant interactions.

Quantification of calcium in the cuticle of the fly larva Exeretonevra angustifrons was undertaken at the micron scale using wavelength dispersive X-ray microanalysis, analytical standards, and a full matrix correction. Calcium and phosphorus were found to be present in the exoskeleton in a ratio that indicates amorphous calcium phosphate. This was confirmed through electron diffraction of the calcium-containing tissue. Due to the pragmatic difficulties of measuring light elements, it is not uncommon in the field of entomology to neglect the use of matrix corrections when performing microanalysis of bulk insect specimens. To determine, firstly, whether such a strategy affects the outcome and secondly, which matrix correction is preferable, phi-rho (z) and ZAF matrix corrections were contrasted with each other and without matrix correction. The best estimate of the mineral phase was found to be given by using the phi-rho (z) correction. When no correction was made, the ratio of Ca to P fell outside the range for amorphous calcium phosphate, possibly leading to flawed interpretation of the mineral form when used on its own.

Quantitative zone-axis convergent beam electron diffraction (CBED) is now an established technique. Over the past decade it has been developed into a tested method for the accurate refinement of structure factors, allowing the details of the charge density and bonding effects to be studied in crystalline materials. Strategies for obtaining the most accurate results have evolved, and the most important influences on the accuracy have been determined. Initial applications of the technique to bond charge density determination have led to the extension of the method to the refinement of other important parameters influencing the experimental data, such as Debye–Waller factors and the absorption potential. The development and current status of quantitative zone-axis CBED are discussed. Prospects for the future development and application of the technique are also considered.