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Three Dimensional Accurate Morphology Measurements of Polystyrene Standard Particles on Silicon Substrate by Electron Tomography

Published online by Cambridge University Press:  23 September 2015

Misa Hayashida ,
Kazuhiro Kumagai  and
Marek Malac
Misa Hayashida
Affiliation:
National Institute for Nanotechnology (NINT), Edmonton, Alberta, Canada
Kazuhiro Kumagai
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan
Marek Malac
Affiliation:
National Institute for Nanotechnology (NINT), Edmonton, Alberta, Canada Department of Physics, University of Alberta, Edmonton, Alberta, Canada

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2405 - 2406
Copyright
Copyright © Microscopy Society of America 2015 

References

Reference:

[1] Misumi, I., et. al., SPIE Proceedings Vol. 8378 (2012) 83780J.CrossRefGoogle Scholar
[2] Hayashida, M., Malac, M., Bergen, M. & Li, P., Ultramicroscopy Vol. 144 (2014) 50–57.Google Scholar
[3] Bergen, M., et. al., Microscopy and Microanalysis 19(S2 (2013) 1394–1395.CrossRefGoogle Scholar