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Sub-Angstrom Probe Size in HADF-STEM at 120KV

Published online by Cambridge University Press:  01 November 2002

P.E. Batson ,
N. Dellby  and
O.L. Krivanek
P.E. Batson
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, New York 10598
N. Dellby
Affiliation:
Nion, Inc., Kirkland, Washington
O.L. Krivanek
Affiliation:
Nion, Inc., Kirkland, Washington

Abstract

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Type
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Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 14 - 15
Copyright
Copyright © Microscopy Society of America 2002