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Strain- and Defect-Enhanced Cavity Formation and Au Precipitation at the Interfaces of a ZrO2/SiO2/Si Heterostructure

Published online by Cambridge University Press:  01 August 2010

P Edmondson
Affiliation:
Pacific Northwest National Laboratory
C Wang
Affiliation:
Pacific Northwest National Laboratory
Z Zhu
Affiliation:
Pacific Northwest National Laboratory
F Namavar
Affiliation:
University of Nebraska
WJ Weber
Affiliation:
Pacific Northwest National Laboratory
Y Zhang
Affiliation:
Pacific Northwest National Laboratory

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2010