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A STEM-based Path Towards Atomic-scale Silicon-based Devices

Published online by Cambridge University Press:  05 August 2019

Bethany M. Hudak ,
Stephen Jesse ,
Jiaming Song ,
Albina Borisevich ,
Paul C. Snijders ,
Sergei V. Kalinin  and
Andrew R. Lupini
Bethany M. Hudak*
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA.
Stephen Jesse
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA. Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA.
Jiaming Song
Affiliation:
Materials Science & Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, USA.
Albina Borisevich
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA.
Paul C. Snijders
Affiliation:
Materials Science & Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, USA.
Sergei V. Kalinin
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA. Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA.
Andrew R. Lupini*
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA. Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA.
*
*Corresponding authors: hudakbm@ornl.gov, arl1000@ornl.gov
*Corresponding authors: hudakbm@ornl.gov, arl1000@ornl.gov

Abstract

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Type
The Success of TMBA: TEM and STEM Developments in Techniques, Applications and Education
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 2290 - 2291
Copyright
Copyright © Microscopy Society of America 2019 

Footnotes

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Present address: School of Physics, Northwest University, Xi'an, China

References

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[3]Susi, T et al. , Ultramicroscopy 180 (2017), p. 163.Google Scholar
[4]Dyck, O et al. , Applied Physics Letters 111 (2017), p. 113104.Google Scholar
[5]Hudak, BM et al. , ACS Nano 12 (2018), p. 5873.Google Scholar
[6]Celler, GK and Cristoloveanu, S, Journal of Applied Physics 93 (2003), p. 4955.Google Scholar
[7]Roberts, MM et al. , Nature Materials 5 (2006), p. 388.Google Scholar
[8]Scott, SA and Lagally, MG, Journal of Physics D 40 (2007), p. R75Google Scholar
[9]Research supported by Oak Ridge National Laboratory's (ORNL's) Center for Nanophase Materials Sciences, which is a U.S. Department of Energy (DOE) Office of Science User Facility (SJ, SVK), ORNL's Laboratory Directed Research and Development Programs, managed by UT-Battelle, LLC for the U.S. DOE (BMH, JS, PCS), and the U.S. DOE, Office of Science, Basic Energy Sciences, Division of Materials Sciences and Engineering (AB, ARL). This manuscript has been authored by UT-Battelle, LLC, under contract DE-AC05-00OR22725 with the US Department of Energy (DOE). The US government retains and the publisher, by accepting the article for publication, acknowledges that the US government retains a nonexclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this manuscript, or allow others to do so, for US government purposes. DOE will provide public access to these results of federally sponsored research in accordance with the DOE Public Access Plan (http://energy.gov/downloads/doe-public-access-plan).Google Scholar