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Site specific He ion irradiation damage studies in nanolayered thin films by cross-coupling Helium Ion Microscopy with TEM and APT

Published online by Cambridge University Press:  23 November 2012

S. Vaithaiyalingam ,
A. Devaraj ,
V. Venkata Rama Shesha R ,
C. Wang ,
T. Varga ,
S. Thevuthasan  and
C.H. Henager
S. Vaithaiyalingam
Affiliation:
Environmental Molecular Science Laboratory, Pacific Northwest National Laboratory, Richland, WA
A. Devaraj
Affiliation:
Environmental Molecular Science Laboratory, Pacific Northwest National Laboratory, Richland, WA
V. Venkata Rama Shesha R
Affiliation:
Environmental Molecular Science Laboratory, Pacific Northwest National Laboratory, Richland, WA
C. Wang
Affiliation:
Environmental Molecular Science Laboratory, Pacific Northwest National Laboratory, Richland, WA
T. Varga
Affiliation:
Environmental Molecular Science Laboratory, Pacific Northwest National Laboratory, Richland, WA
S. Thevuthasan
Affiliation:
Environmental Molecular Science Laboratory, Pacific Northwest National Laboratory, Richland, WA
C.H. Henager
Affiliation:
Pacific Northwest National lab, Richland, WA
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 816 - 817
Copyright
Copyright © Microscopy Society of America 2012

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