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Shedding New Light on Cathodoluminescence—A Low Voltage Perspective

Published online by Cambridge University Press:  05 December 2012

Natasha Erdman ,
Charles Nielsen  and
Vernon E. Robertson
Natasha Erdman*
Affiliation:
JEOL USA Inc., 11 Dearborn Rd., Peabody, MA 01960, USA
Charles Nielsen
Affiliation:
JEOL USA Inc., 11 Dearborn Rd., Peabody, MA 01960, USA
Vernon E. Robertson
Affiliation:
JEOL USA Inc., 11 Dearborn Rd., Peabody, MA 01960, USA
*
*Corresponding author. E-mail: erdman@jeol.com
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Abstract

Previously, imaging and analysis with cathodoluminescence (CL) detectors required using high accelerating voltages. Utilization of lower accelerating voltage for microanalysis has the advantages of reduced beam-specimen interaction volume, and thus better spatial resolution, as well as reduction in electron beam induced damage. This article will highlight recent developments in field emission gun–scanning electron microscope technology that have allowed acquisition of high spatial resolution CL images at very low accelerating voltages. The advantages of low kV CL imaging will be shown using examples of a geological specimen (shale) and a specimen of an industrial grade diamond.

Keywords

cathodoluminescencelow voltageFEG-SEMpanchromatic
Type
Special Section: Cathodoluminescence
Information
Microscopy and Microanalysis , Volume 18 , Issue 6 , December 2012 , pp. 1246 - 1252
Copyright
Copyright © Microscopy Society of America 2012

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