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Selective Detection of Backscattered Electrons in the Compound Lens Equipped UHR SEM

Published online by Cambridge University Press:  25 July 2016

Petr Wandrol
Affiliation:
FEI Company, Brno, Czech Republic
Radovan Vašina
Affiliation:
FEI Company, Brno, Czech Republic
Adrian Sandu
Affiliation:
FEI Company, Eindhoven, the Netherlands
Ernst Jan Vesseur
Affiliation:
FEI Company, Eindhoven, the Netherlands
Lubomir Tůma
Affiliation:
FEI Company, Brno, Czech Republic
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Abstract

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© Microscopy Society of America 2016 

References

[1] PdCeO2 sample courtesy of Dr. Alessandro Lavacchi, CNR ICCOM.Google Scholar
[2] Ag particles on polymer sample courtesy of the TE01020218 project team, Membrain.Google Scholar
[3] The authors acknowledge funding from the Technology Agency of the Czech Republic, TE01020118.Google Scholar
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