Skip to main content Accessibility help
×
Home
Hostname: page-component-5d6d958fb5-ls6xp Total loading time: 0.41 Render date: 2022-11-28T06:04:57.575Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "useRatesEcommerce": false, "displayNetworkTab": true, "displayNetworkMapGraph": false, "useSa": true } hasContentIssue true

A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography

Published online by Cambridge University Press:  30 July 2021

Masoud Dialameh
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Jeroen Scheerder
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Richard J. H. Morris
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Johan Meersschaut
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, United States
Olivier Richard
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, United States
Wilfried Vandervorst
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium, United States
Paul van der Heide
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, United States
Claudia Fleischmann
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium,Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium, Belgium
Rights & Permissions[Opens in a new window]

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advanced Application of Atom Probe Tomography: Specimen preparation, Instrumentation, and Data analysis
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Cuduvally, R., Morris, R. J. H., Ferrari, P., Bogdanowicz, J., Fleischmann, C., Melkonyan, D. & Vandervorst, W., “Potential sources of compositional inaccuracy in the atom probe tomography of InxGa1-xAs”, Ultramicroscopy 210, 112918 (2019)CrossRefGoogle ScholarPubMed
Estivill, R. et al. , "Quantitative investigation of SiGeC layers using atom probe tomography." Ultramicroscopy 150, 23 (2015)CrossRefGoogle ScholarPubMed
Mancini, L. et al. , “Composition of Wide Bandgap Semiconductor Materials and Nanostructures Measured by Atom Probe Tomography and Its Dependence on the Surface Electric FieldJ. Phys. Chem. C 118, 24136 (2014)CrossRefGoogle Scholar
Martin, A. J. & Yatzor, B., “Examining the Effect of Evaporation Field on Boron Measurements in SiGe: Insights into Improving the Relationship Between APT and SIMS measurements of Boron”, Microscopy and Microanalysis 25, 617 (2019)CrossRefGoogle ScholarPubMed
Mertens, H. et al. , “Gate-All-Around Transistors Based on Vertically Stacked Si Nanowires”, ECS Trans. 77, 19 (2017)CrossRefGoogle Scholar
Morris, R.J.H., Cuduvally, R., Melkonyan, D., Zhao, M., van der Heide, P., Vandervorst, W., “Atom probe of GaN/AlGaN heterostructures: The role of electric field, sample crystallography and laser excitation on quantification”, Ultramicroscopy 206, 112813 (2019)CrossRefGoogle ScholarPubMed
Vandervorst, W., Fleischmann, C., Bogdanowicz, J., Franquet, A., Celano, U., Paredis, K., Budrevich, A., “Dopant, composition and carrier profiling for 3D structures”, Materials Science in Semiconductor Processing 62, 31 (2017)CrossRefGoogle Scholar
You have Access

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *