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A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography

Published online by Cambridge University Press:  30 July 2021

Masoud Dialameh
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Jeroen Scheerder
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Richard J. H. Morris
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Johan Meersschaut
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, United States
Olivier Richard
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, United States
Wilfried Vandervorst
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium, United States
Paul van der Heide
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, United States
Claudia Fleischmann
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium,Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium, Belgium

Abstract

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Type
Advanced Application of Atom Probe Tomography: Specimen preparation, Instrumentation, and Data analysis
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

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