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Robotic Fabrication of High-quality Lamellae for Aberration-corrected Transmission Electron Microscopy

Published online by Cambridge University Press:  22 July 2022

Mikhail Dutka ,
Brandon Van Leer ,
Hideyo Tsurusawa ,
Nobuto Nakanishi ,
Kayoko Kawano ,
Yiquiang Cheng  and
Teruyasu Mizoguchi
Mikhail Dutka
Affiliation:
Thermo Fisher Scientific, Eindhoven, The Netherlands
Brandon Van Leer
Affiliation:
Thermo Fisher Scientific, Hillsboro, OR, USA
Hideyo Tsurusawa*
Affiliation:
Thermo Fisher Scientific, FEI Japan Ltd., Shinagawa-ku, Tokyo, Japan
Nobuto Nakanishi
Affiliation:
Thermo Fisher Scientific, FEI Japan Ltd., Shinagawa-ku, Tokyo, Japan
Kayoko Kawano
Affiliation:
Thermo Fisher Scientific, FEI Japan Ltd., Shinagawa-ku, Tokyo, Japan
Yiquiang Cheng
Affiliation:
Thermo Fisher Scientific, Eindhoven, The Netherlands
Teruyasu Mizoguchi*
Affiliation:
Institute of Industrial Science, University of Tokyo, Meguro-ku, Tokyo, Japan
*
*Corresponding authors: Hideyo.Tsurusawa@thermofisher.com, teru@iis.u-tokyo.ac.jp
*Corresponding authors: Hideyo.Tsurusawa@thermofisher.com, teru@iis.u-tokyo.ac.jp

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 54 - 56
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Copyright
Copyright © Microscopy Society of America 2022

References

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Van Leer, B. et al. Micros. Today 26, 18–25 (2018).10.1017/S1551929517001195CrossRefGoogle Scholar
Tsurusawa, H., Nakanishi, N., Kawano, K. et al. Sci. Rep. 11, 21599 (2021). https://doi.org/10.1038/s41598-021-00595-xCrossRefGoogle Scholar