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Residual Strain Measurement of SOI Wafer Using Convergent Beam Electron Diffraction

Published online by Cambridge University Press:  01 August 2005

K Kuramochi ,
T Yamazaki ,
T Isaka ,
K Watanabe  and
I Hashimoto
K Kuramochi
Affiliation:
Tokyo University of Science
T Yamazaki
Affiliation:
Tokyo University of Science
T Isaka
Affiliation:
Tokyo University of Science
K Watanabe
Affiliation:
Tokyo Metropolitan College of Technology
I Hashimoto
Affiliation:
Tokyo University of Science

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 776 - 777
Copyright
© 2005 Microscopy Society of America