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Raman Spectroscopy and Electron Microscopy Studies of Ga FIB and Post-FIB Ar Ion Milling's Impact on Si TEM Specimens

Published online by Cambridge University Press:  22 July 2022

C.S. Bonifacio ,
S. Tan ,
P. Nowakowski ,
M.L. Ray  and
P.E. Fischione
C.S. Bonifacio*
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA, USA
S. Tan
Affiliation:
Department of Electrical and Computer Engineering & Nanoscale Fabrication and Characterization Facility, University of Pittsburgh, Pittsburgh, PA USA
P. Nowakowski
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA, USA
M.L. Ray
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA, USA
P.E. Fischione
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA, USA
*
*Corresponding author: cs_bonifacio@fischione.com

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 52 - 53
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Copyright
Copyright © Microscopy Society of America 2022

References

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