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Quantification of Interfacial Roughness of In2O3/ZrO2 Superlattice Films in 3D

Published online by Cambridge University Press:  26 July 2009

X Zhong ,
B Kabius ,
D Schreiber ,
J Eastman ,
D Fong  and
A Petford-Long
X Zhong
Affiliation:
Argonne National Laboratory
B Kabius
Affiliation:
Argonne National Laboratory
D Schreiber
Affiliation:
Northwestern University
J Eastman
Affiliation:
Argonne National Laboratory
D Fong
Affiliation:
Argonne National Laboratory
A Petford-Long
Affiliation:
Argonne National Laboratory

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 600 - 601
Copyright
Copyright © Microscopy Society of America 2009