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Performance of Low-voltage Electron Microscope with New Aberration Correction System and Cold Field Emission Gun

Published online by Cambridge University Press:  26 July 2009

T Sasaki ,
H Sawada ,
T Nakamichi ,
F Hosokawa ,
K Omoto ,
T Tomita ,
T Kaneyama ,
Y Kondo ,
K Kimoto  and
K Suenaga
T Sasaki
Affiliation:
JEOL Ltd,Japan
H Sawada
Affiliation:
JEOL Ltd,Japan
T Nakamichi
Affiliation:
JEOL Ltd,Japan
F Hosokawa
Affiliation:
JEOL Ltd,Japan
K Omoto
Affiliation:
JEOL Ltd,Japan
T Tomita
Affiliation:
JEOL Ltd,Japan
T Kaneyama
Affiliation:
JEOL Ltd,Japan
Y Kondo
Affiliation:
JEOL Ltd,Japan
K Kimoto
Affiliation:
National Institute for Materials Science,Japan
K Suenaga
Affiliation:
National Institute of Advanced Industrial Science and Technology,Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 1080 - 1081
Copyright
Copyright © Microscopy Society of America 2009