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A new beam alignment method in SEM based on parallax principle

Published online by Cambridge University Press:  30 July 2021

Luyang Han ,
Markus Boese ,
Bjoern Gamm  and
Benjamin Tordoff
Luyang Han
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Markus Boese
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Bjoern Gamm
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Benjamin Tordoff
Affiliation:
Carl Zeiss Microscopy GmbH, Germany

Abstract

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Type
Full System and Workflow Automation for Enabling Big Data and Machine Learning in Electron Microscopy
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1612 - 1613
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Reimer, L., Scanning Electron Microscopy, 2nd. Edition (Springer), p 50Google Scholar