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Model-Based Library for Critical Dimension Metrology by CD-SEM

Published online by Cambridge University Press:  27 August 2014

Y.B. Zou ,
P. Zhang ,
S.F. Mao  and
Z.J. Ding
Y.B. Zou
Affiliation:
Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics, University of Science and Technology of China, 96 Jinzhai Road, Hefei, Anhui 230026, P.R. China
P. Zhang
Affiliation:
Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics, University of Science and Technology of China, 96 Jinzhai Road, Hefei, Anhui 230026, P.R. China
S.F. Mao
Affiliation:
School of Nuclear Science and Technology, University of Science and Technology of China, 96 Jinzhai Road, Hefei, Anhui 230026, P.R. China
Z.J. Ding
Affiliation:
Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics, University of Science and Technology of China, 96 Jinzhai Road, Hefei, Anhui 230026, P.R. China

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 6 - 7
Copyright
Copyright © Microscopy Society of America 2014 

References

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[3] Ding, Z. J. and Shimizu, R., Scanning 18 (1996), p. 92.Google Scholar
[4] Mao, S.F. et al, J. Appl. Phys. 104 (2008), p. 114907-1.Google Scholar
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[6] The authors acknowledge funding from the National Natural Science Foundation of China (Nos. 11274288 and 11204289), the National Basic Research Program of China (Nos. 2011CB932801 and 2012CB933702), Ministry of Education of China (No. 20123402110034) and “111” project (No. B07033), and Chinese Academy of Sciences (No. XXH12503-02-02-07).Google Scholar