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Microreactor for Clean and Controlled In-situ SEM Imaging of CVD Processes

Published online by Cambridge University Press:  30 July 2020

Libor Novak
Affiliation:
Thermo Fisher Scientific, Brno, Jihomoravsky kraj, Czech Republic
Petr Wandrol
Affiliation:
Thermo Fisher Scientific, Brno, Jihomoravsky kraj, Czech Republic
Ernst Jan R. Vesseur
Affiliation:
Thermo Fisher Scientific, Eindhoven, Noord-Brabant, Netherlands
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Abstract

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Type
Approaching Operando Imaging of Functional Materials
Copyright
Copyright © Microscopy Society of America 2020

References

Wang, Z., Dong, J., Cui, Y., et al. Stacking sequence and interlayer coupling in few-layer graphene revealed by in situ imaging. Nat Commun 7, 13256 (2016). https://doi.org/10.1038/ncomms13256CrossRefGoogle ScholarPubMed
Novak, L., Kolibal, M., Wu, M., Wandrol, P., & Vystavel, T. Control and in-situ imaging of heat & gas mediated processes in FIB/SEM system. Microscopy and Microanalysis, 24(S1), 808809 (2018). doi:10.1017/S1431927618004531CrossRefGoogle Scholar
Wang, Z., Dong, J., Li, L. et al. The coalescence behavior of two-dimensional materials revealed by multiscale in situ imaging during chemical vapour deposition growth. ACS Nano 2020 just accepted. https://doi.org/10.1021/acsnano.9b08221Google Scholar
Wang, Z., Weinberg, G., Zhang, Q. et al. Direct observation of graphene growth and associated copper substrate dynamics by in situ scanning electron microscopy. ACS Nano 2015, 9 (2), 15061519. https://doi.org/10.1021/nn5059826CrossRefGoogle ScholarPubMed
Mele, L. et al. A MEMS-based heating holder for the direct imaging of simultaneous in-situ heating and biasing experiments in scanning/transmission electron microscopes. Microscopy Research and Technique 79 (2016) p. 239. https://doi.org/10.1002/jemt.22623CrossRefGoogle ScholarPubMed
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