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A Method for Site Specific Characterization Using a Dedicated FIB System Combined With an Analyitical TEM

Published online by Cambridge University Press:  02 July 2020

T. Kamino ,
T. Yaguchi ,
H. Matsumoto ,
H. Kobayashi  and
H. Koike
T. Kamino
Affiliation:
Hitachi Science Systems, Ltd., 882 Ichige, Hitachinaka, Ibaraki, 312-8504, Japan
T. Yaguchi
Affiliation:
Hitachi Science Systems, Ltd., 882 Ichige, Hitachinaka, Ibaraki, 312-8504, Japan
H. Matsumoto
Affiliation:
Hitachi Science Systems, Ltd., 882 Ichige, Hitachinaka, Ibaraki, 312-8504, Japan
H. Kobayashi
Affiliation:
Instrument Division, Hitachi Ltd., 882 Ichige, Hitachinaka, Ibaraki, 312-8504, Japan
H. Koike
Affiliation:
Instrument Division, Hitachi Ltd., 882 Ichige, Hitachinaka, Ibaraki, 312-8504, Japan
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Extract

A method for site specific characterization of the materials using a dedicated focused ion beam(FIB) system and an analytical transmission electron microscope (TEM) was developed. Needless to say, in TEM specimen preparation using FIB system, stability of a specimen is quite important. The specimen stage employed in the developed FIB system is the one designed for high resolution TEM, and the specimen drift rate of the stage is less than lnm/min. In addition, FIB-TEM compatible specimen holder which allows milling of a specimen with the FIB system and observation of the specimen with the TEM without re-loading was developed. To obtain thin specimen from the area to be characterized correctly, confirmation of the area before final milling is needed. However, observation of cross sectional view in a FIB system is recommended because it causes damage by Ga ion irradiation. To solve this problem, we used a STEM unit as a viewer of FIB milled specimen.

Type
Precision Specimen Preparation
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 914 - 915
Copyright
Copyright © Microscopy Society of America

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References

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