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Mapping Ferroelectricity in Hafnia Thin Films with STEM EBIC

Published online by Cambridge University Press:  05 August 2019

Ho Leung Chan ,
William A. Hubbard ,
Jared J. Lodico  and
B. C. Regan
Ho Leung Chan
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA, USA.
William A. Hubbard
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA, USA.
Jared J. Lodico
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA, USA.
B. C. Regan*
Affiliation:
Department of Physics & Astronomy and California NanoSystems Institute, University of California, Los Angeles, CA, USA.
*
*Corresponding author: regan@physics.ucla.edu

Abstract

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Type
In situ TEM of Nanoscale Materials and Electronic Devices for Phase Transformation Studies
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 1846 - 1847
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Böscke, TS et al. , Applied Physics Letters 99 (2011), p. 102903.Google Scholar
[2]Müller, J et al. , ECS Journal of Solid State Science and Technology 4 (2015), p. N30.Google Scholar
[3]Mikolajick, T et al. , MRS Bulletin 43 (2018), p. 340.Google Scholar
[4]Migita, S, ECS Transactions 80 (2017), p. 247.Google Scholar
[5]Grimley, ED, Advanced Materials Interfaces 5 (2018), p. 1701258.Google Scholar
[6]White, ER et al. , Applied Physics Letters 107 (2015), p. 223104.Google Scholar
[7]Hubbard, WA et al. , Physical Review Applied 10 (2018), p. 044066.Google Scholar
[8]This work was supported by National Science Foundation (NSF) award DMR-1611036, by NSF Science and Technology Center (STC) award DMR-1548924 (STROBE), and by the UCLA PSEIF.Google Scholar