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Light Element Imaging Technique at Low Dose Condition by Processing Simultaneously Obtained STEM Images Using a Segmented Detector

Published online by Cambridge University Press:  05 August 2019

Kousuke Ooe
Affiliation:
Institute of Engineering Innovation, School of Engineering, the University of Tokyo, Tokyo, Japan.
Takehito Seki
Affiliation:
Institute of Engineering Innovation, School of Engineering, the University of Tokyo, Tokyo, Japan.
Yuichi Ikuhara
Affiliation:
Institute of Engineering Innovation, School of Engineering, the University of Tokyo, Tokyo, Japan. Nanostructure Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan.
Naoya Shibata
Affiliation:
Institute of Engineering Innovation, School of Engineering, the University of Tokyo, Tokyo, Japan. Nanostructure Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan.

Abstract

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Type
Low Voltage, Low Energy Electron Microscopy Imaging and Analysis
Copyright
Copyright © Microscopy Society of America 2019 

References

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[4]Shibata, N. et al. , Journal of Electron Microscopy 59 (2010) 473Google Scholar
[5]Seki, T. et al. , Ultramicroscopy 194 (2018), 193Google Scholar
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[7]The authors acknowledge funding from JST SENTAN, KAKENHI JSPS Grant No. JP17H01316 and Grant-in-Aid for Specially Promoted Research “Atom-by-atom imaging of ion dynamics in nano-structures for materials innovation” (Grant No. JP17H06094).Google Scholar