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The Joy in imaging the Auger Electron Signal in a FESEM using a Segmented Annular BSED and Stage Bias

Published online by Cambridge University Press:  01 August 2018

B.J. Griffin ,
A.A. Suvorova ,
D.C. Joy  and
J.R. Michael
B.J. Griffin
Affiliation:
Centre for Microscopy, Characterization and Analysis, The University of Western Australia, Crawley, WAAustralia.
A.A. Suvorova
Affiliation:
Centre for Microscopy, Characterization and Analysis, The University of Western Australia, Crawley, WAAustralia.
D.C. Joy
Affiliation:
Center for NanoPhase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN.
J.R. Michael
Affiliation:
Sandia National Laboratories, PO Box 5800, Albuquerque, NM.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 620 - 621
Copyright
© Microscopy Society of America 2018 

References

References:

[1] Griffin, B.J., Joy, D.C. Michael, J. Microsc Microanal 20(S2 2015.Google Scholar
[2] Reimer, L. Scanning Electron Microscopy (Springer) (p 527.Google Scholar
[3] Buckley, D.H. NASA TN (1970), D-7010.Google Scholar
[4] FEI is acknowledged for access to their DBS modelling software.Google Scholar
[5] Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy (DOE) under contract DE- AC0494AL85000.Google Scholar