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Interpretation of Energy-Filtered BSE Images at Ultra Low Voltage Conditions

Published online by Cambridge University Press:  27 August 2014

Y. Hashimoto ,
T. Yokosuka ,
H. Ito ,
S. Takeuchi ,
M. Sasajima  and
M. Konno
Y. Hashimoto
Affiliation:
Application Development Department, Science & Medical Systems Design Division, Hitachi High-Technologies, 1040, Ichige, Hitachinaka, Ibaraki, 312-0033, Japan
T. Yokosuka
Affiliation:
1st Department, Research and Development Division, Hitachi High-Technologies, 882, Ichige, Hitachinaka, Ibaraki, 312-8504, Japan
H. Ito
Affiliation:
Application Development Department, Science & Medical Systems Design Division, Hitachi High-Technologies, 1040, Ichige, Hitachinaka, Ibaraki, 312-0033, Japan
S. Takeuchi
Affiliation:
Advanced Microscope Systems Design Department, Science & Medical Systems Design Division, Hitachi High-Technologies, 882, Ichige, Hitachinaka, Ibaraki, 312-8504, Japan
M. Sasajima
Affiliation:
Advanced Microscope Systems Design Department, Science & Medical Systems Design Division, Hitachi High-Technologies, 882, Ichige, Hitachinaka, Ibaraki, 312-8504, Japan
M. Konno
Affiliation:
Application Development Department, Science & Medical Systems Design Division, Hitachi High-Technologies, 1040, Ichige, Hitachinaka, Ibaraki, 312-0033, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 34 - 35
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Hashimoto, Y., et al. Microsc. Microanal. 19 (Suppl 2), 1176-1177 (2013).Google Scholar