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Integrated Nanophotonic Electron Beam Modulators Enable Ultra-High Precise Method for Calibrating EELS Spectrometers

Published online by Cambridge University Press:  22 July 2022

Alexey Sapozhnik ,
Paolo Cattaneo ,
Bruce R. M. Weaver ,
Arslan Sajid Raja ,
Yujia Yang ,
Tobias J. Kippenberg ,
Fabrizio Carbone  and
Thomas LaGrange
Alexey Sapozhnik
Affiliation:
Laboratory of Ultrafast Microscopy and Electron Scattering, École polytechnique fédérale de Lausanne (EPFL), Lausanne Switzerland
Paolo Cattaneo
Affiliation:
Laboratory of Ultrafast Microscopy and Electron Scattering, École polytechnique fédérale de Lausanne (EPFL), Lausanne Switzerland
Bruce R. M. Weaver
Affiliation:
Laboratory of Ultrafast Microscopy and Electron Scattering, École polytechnique fédérale de Lausanne (EPFL), Lausanne Switzerland
Arslan Sajid Raja
Affiliation:
Laboratory of Photonics and Quantum Measurements, École polytechnique fédérale de Lausanne (EPFL), Lausanne, Switzerland
Yujia Yang
Affiliation:
Laboratory of Photonics and Quantum Measurements, École polytechnique fédérale de Lausanne (EPFL), Lausanne, Switzerland
Tobias J. Kippenberg
Affiliation:
Laboratory of Photonics and Quantum Measurements, École polytechnique fédérale de Lausanne (EPFL), Lausanne, Switzerland
Fabrizio Carbone
Affiliation:
Laboratory of Ultrafast Microscopy and Electron Scattering, École polytechnique fédérale de Lausanne (EPFL), Lausanne Switzerland
Thomas LaGrange*
Affiliation:
Laboratory of Ultrafast Microscopy and Electron Scattering, École polytechnique fédérale de Lausanne (EPFL), Lausanne Switzerland
*
*Corresponding author: thomas.lagrange@epfl.ch

Abstract

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Type
Science of Metrology with Electrons
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 792 - 793
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Copyright
Copyright © Microscopy Society of America 2022

References

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