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In-situ Low Energy Argon Ion Source for the Improvement of EBSD Pattern Acquisition

Published online by Cambridge University Press:  01 August 2018

Romaine Isaacs
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00Brno, Czech Republic
Anna Prokhodtseva
Affiliation:
Thermo Fisher Scientific, Achtseweg Noord 5, 5651 GGEindhoven, Netherlands
Tomas Vystavel
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00Brno, Czech Republic

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2018 

References

[1] Mulders, J. Trompenaars, P. (2016) An in-situ Low Energy Argon Ion Source for Local Surface Modification. European Microscopy Congress 2016: Proceedings, 453454.Google Scholar
[2] Prokhodtseva, A., Mulders, J. Vystavel, T. (2017) Applications of an in-situ Low Energy Argon Ion Source for Improvement of TEM and SEM Sample Quality. Microscopy and Microanalysis 23(S1), 298299. doi: 10.1017/S1431927617002173.Google Scholar