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Improvement of Spatial Resolution in Z Direction with Improved Energy Spread Measured using Aberration Corrected STEM with Cold Field Emission Gun

Published online by Cambridge University Press:  05 August 2019

Hiroki Hashiguchi ,
Ryusuke Sagawa ,
Noriaki Endo ,
Eiji Okunishi  and
Yukihito Kondo
Hiroki Hashiguchi*
Affiliation:
JEOL Ltd.3-1-2 Musashino Akishima Tokyo, Japan
Ryusuke Sagawa
Affiliation:
JEOL Ltd.3-1-2 Musashino Akishima Tokyo, Japan
Noriaki Endo
Affiliation:
JEOL Ltd.3-1-2 Musashino Akishima Tokyo, Japan
Eiji Okunishi
Affiliation:
JEOL Ltd.3-1-2 Musashino Akishima Tokyo, Japan
Yukihito Kondo
Affiliation:
JEOL Ltd.3-1-2 Musashino Akishima Tokyo, Japan
*
*Corresponding author: hhashigu@jeol.co.jp

Abstract

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Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 514 - 515
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Morishita, S et al. , Microscopy 67 (2018), p. 46.Google Scholar
[2]Benthem, K et al. , Ultramicroscopy 106 (2006), p. 1062.Google Scholar