Hostname: page-component-cd9895bd7-7cvxr Total loading time: 0 Render date: 2025-01-02T20:11:50.243Z Has data issue: false hasContentIssue false
  • English
  • Français

Improved Z-axis Resolution in Serial Block Face SEM with Dual Primary Energies and Monte Carlo Simulation of Electron Scattering

Published online by Cambridge University Press:  01 August 2018

Q. He ,
D.C. Joy ,
G. Zhang  and
R.D. Leapman
Q. He
Affiliation:
National Institute of Biomedical Imaging and Bioengineering, NIH, Bethesda, USA.
D.C. Joy
Affiliation:
Department of Materials Science and Engineering, University of Tennessee, Knoxville, USA. Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, USA.
G. Zhang
Affiliation:
National Institute of Biomedical Imaging and Bioengineering, NIH, Bethesda, USA.
R.D. Leapman
Affiliation:
National Institute of Biomedical Imaging and Bioengineering, NIH, Bethesda, USA.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 1440 - 1441
Copyright
© Microscopy Society of America 2018 

References

[1] Hennig, P. Denk, W. J. Appl. Phys. 102 2007) p. 123101.Google Scholar
[2] Boughorbel, F., et al Compnay, FEI US Patent (#US8,232,523 B2) 2011.Google Scholar
[3] Demers, H., et al, Scanning 33 2011) p. 135.Google Scholar
[4] This research was supported by the intramural program of the National Institute of Biomedical Imaging and Bioengineering, National Institutes of Health.Google Scholar