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Improved 4D-STEM Strain Mapping Precision Using Patterned Probes

Published online by Cambridge University Press:  05 August 2019

Steven E. Zeltmann
Affiliation:
Materials Science and Engineering Department, University of California Berkeley, Berkeley, CA, USA.
Alexander Müller
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA.
Karen C. Bustillo
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA.
Benjamin H. Savitzky
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA.
Andrew M Minor
Affiliation:
Materials Science and Engineering Department, University of California Berkeley, Berkeley, CA, USA. National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA.
Colin Ophus*
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA.
*
*Corresponding author: cophus@gmail.com

Abstract

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Type
Electron Crystallography of Nano-structures in Nanotechnology, Materials and Bio-Sciences
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Ozdal, , et al. , Applied Physics Letters 106(2015), 253107.Google Scholar
[2]Pekin, , et al. , Ultramicroscopy 176(2017), p. 170-176.Google Scholar
[3]Mahr, , et al. , Ultramicroscopy 158(2015), p. 38-48.Google Scholar
[5]S.Z. was supported by STROBE: A National Science Foundation Science & Technology Center under Grant No. DMR 1548924. B.S was supported by Toyota Research Institute. Work at the Molecular Foundry was supported by the Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231.Google Scholar