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The Hyperion™ Ion Probe for Next Generation FIB, SIMS and Nano-Ion, Implantation

Published online by Cambridge University Press:  26 July 2009

N Smith ,
P Tesch ,
N Martin  and
R Boswell
N Smith
Affiliation:
Oregon Physics
P Tesch
Affiliation:
Oregon Physics
N Martin
Affiliation:
Oregon Physics
R Boswell
Affiliation:
Australian National University,Australia

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 312 - 313
Copyright
Copyright © Microscopy Society of America 2009