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High Precision Phase-Shifting Electron Holography with Multiple Biprisms for GaN Semiconductor Devices

Published online by Cambridge University Press:  01 August 2018

Kazuo Yamamoto
Kazuo Yamamoto*
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 1554 - 1555
Copyright
© Microscopy Society of America 2018 

References

[1] Tonomura, A. Electron Holography. Springer Series in Optical Sciences Vol. 70 Springer, Heidelberg.Google Scholar
[2] Vòlkl, E., Allard, L. F. and Joy, D. C. (eds.) Introduction to Electron Holography. Kluwer Academic/Plenum Publishers New York.Google Scholar
[3] Ru, Q., Endo, J., Tanji, T. Tonomura, A. Appl. Phys. Lett. 59 1991 2372.Google Scholar
[4] Yamamoto, K., Kawajiri, I., Tanji, T., Hibino, M. Hirayama, T. J. Electron Microsc. 49 2000 31.Google Scholar
[5] Ambacher, Q., et al., J. Appl. Phys. 87 2000 334.Google Scholar
[6] The author thanks Mr. Yasunori Goto and Mr. Tomoyoshi Kushida in Toyota Motor Corporation for supplying the GaN samples and valuable discussion.Google Scholar