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The Helium Ion Microscope - a Versatile Tool for a Wide Range of Applications

Published online by Cambridge University Press:  09 October 2013

B. Goetze ,
C. Huynh ,
L. Stern ,
H. Wu ,
D. Ferranti  and
M. Ananth
B. Goetze
Affiliation:
C. Huynh
Affiliation:
L. Stern
Affiliation:
H. Wu
Affiliation:
D. Ferranti
Affiliation:
M. Ananth
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 908 - 909
Copyright
Copyright © Microscopy Society of America 2013