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Hardware and Software Advances in Commercially Available Atom Probe Tomography Systems

Published online by Cambridge University Press:  04 August 2017

Robert M. Ulfig
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Ty J. Prosa
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Yimeng Chen
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Katherine P. Rice
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Isabelle. Martin
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
David A. Reinhard
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Brian P. Gieser
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Edward Oltman
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Dan R. Lenz
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Joseph Bunton
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Michael Van Dyke
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Thomas F. Kelly
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
David J. Larson
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
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Abstract

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Copyright
© Microscopy Society of America 2017 

References

[1] Larson, D.J., et al, Local Electrode Atom Probe Tomography. Springer New York 2013.CrossRefGoogle Scholar
[2] Rice, K.P., et al, Microscopy and Microanalysis 22(3 2016). p 583.CrossRefGoogle Scholar
[3] Vurpillot, F., et al, Semiconductor Science and Technology 31(7 2016). p 074002.CrossRefGoogle Scholar
[4] Geiser, B., et al These Proceedings (2017).Google Scholar
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