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Focused Soft X-Ray Beam Induced Deposition: Recent Advances to a Novel Approach for Fabrication of Metallic Nanostructures

Published online by Cambridge University Press:  10 August 2018

Andreas Spath*
Affiliation:
Physical Chemistry II, Friedrich-Alexander-Universitat Erlangen-Nurnberg, Erlangen, Germany.
Florian Vollnhals
Affiliation:
Physical Chemistry II, Friedrich-Alexander-Universitat Erlangen-Nurnberg, Erlangen, Germany.
Fan Tu
Affiliation:
Physical Chemistry II, Friedrich-Alexander-Universitat Erlangen-Nurnberg, Erlangen, Germany. present address: Carl Zeiss Semiconductor Manufacturing Technology, RoBdorf, Germany.
Kevin C. Prince
Affiliation:
Elettra-Sincrotrone Trieste, Area Science Park, Trieste, Italy.
Robert Richter
Affiliation:
Elettra-Sincrotrone Trieste, Area Science Park, Trieste, Italy.
Jorg Raabe
Affiliation:
Swiss Light Source, Paul Scherrer Institut, Villigen, Switzerland.
Hubertus Marbach
Affiliation:
Physical Chemistry II, Friedrich-Alexander-Universitat Erlangen-Nurnberg, Erlangen, Germany.
Rainer H. Fink
Affiliation:
Physical Chemistry II, Friedrich-Alexander-Universitat Erlangen-Nurnberg, Erlangen, Germany. CENEM, Friedrich-Alexander-Universitat Erlangen-Nurnberg, Erlangen, Germany.
*
* Corresponding author, andreas.spaeth@fau.de
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© Microscopy Society of America 2018 

References

[1] Spath, A, etal, RSC Adv. 6 2016 98344.CrossRefGoogle Scholar
[2] Tu, F, et al, J. Vac. Sci. Technol. B 35(3 2017 031601.CrossRefGoogle Scholar
[3] Wang, J, et al, J. Phys. Chem. C 111 2007 16330.CrossRefGoogle Scholar
[4] Cazaux, J J. Microsc. 188(2 1997 106.CrossRefGoogle Scholar
[5] Tu, F, et al, Nanotechnology 27 2016 355302.CrossRefGoogle Scholar
[6] The authors gratefully acknowledge support by B. Watts and B. Sarafimov during beamtime at the PolLux beamline. H.M. acknowledges funding by DFG grant MA 4246/1-2, Cost action 1301 CELINA and MSCA-ITN 2016. R.H.F. acknowledges funding by the German Minister of Education and Research, contract 05 K16 WED. A.S. acknowledges funding by DFG grant SP 1775/1-1.Google Scholar
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Focused Soft X-Ray Beam Induced Deposition: Recent Advances to a Novel Approach for Fabrication of Metallic Nanostructures
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