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The First Results of the Low Voltage Cold-FE SEM/STEM System Equipped With EELS

Published online by Cambridge University Press:  25 July 2016

Yu Yamazawa ,
Satoshi Okada ,
Zulihuma Yasenjiang ,
Takeshi Sunaoshi  and
Kazutoshi Kaji
Yu Yamazawa
Affiliation:
Hitachi High-Technologies Corp., Electron Microscope Systems Design 1st Dept., Ibaraki, Japan
Satoshi Okada
Affiliation:
Hitachi High-Technologies Corp., Electron Microscope Systems Design 1st Dept., Ibaraki, Japan
Zulihuma Yasenjiang
Affiliation:
Hitachi High-Technologies Corp., Electron Microscope Systems Design 1st Dept., Ibaraki, Japan
Takeshi Sunaoshi
Affiliation:
Hitachi High-Technologies Corp., Application Development Dept., Ibaraki, Japan
Kazutoshi Kaji
Affiliation:
Hitachi High-Technologies Corp., Electron Microscope Systems Design 1st Dept., Ibaraki, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 50 - 51
Copyright
© Microscopy Society of America 2016 

References

References:

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[2] Kaiser, U., et al, Ultramicroscopy 111 (2011) 1239–1246.Google Scholar
[3] Kamimura, O., et al, Ultramicroscopy 110(2 (2010) 130–133.Google Scholar
[4] Konno, M., et al, Ultramicroscopy 145 (2014) 28–35.Google Scholar