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The First Results of the Low Voltage Cold-FE SEM/STEM System Equipped With EELS

Published online by Cambridge University Press:  25 July 2016

Yu Yamazawa
Affiliation:
Hitachi High-Technologies Corp., Electron Microscope Systems Design 1st Dept., Ibaraki, Japan
Satoshi Okada
Affiliation:
Hitachi High-Technologies Corp., Electron Microscope Systems Design 1st Dept., Ibaraki, Japan
Zulihuma Yasenjiang
Affiliation:
Hitachi High-Technologies Corp., Electron Microscope Systems Design 1st Dept., Ibaraki, Japan
Takeshi Sunaoshi
Affiliation:
Hitachi High-Technologies Corp., Application Development Dept., Ibaraki, Japan
Kazutoshi Kaji
Affiliation:
Hitachi High-Technologies Corp., Electron Microscope Systems Design 1st Dept., Ibaraki, Japan

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2016 

References

References:

[1] Suenaga, K. & koshino, M. Nature 468 (2010) 10881090.Google Scholar
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[3] Kamimura, O., et al, Ultramicroscopy 110(2 (2010) 130133.Google Scholar
[4] Konno, M., et al, Ultramicroscopy 145 (2014) 2835.Google Scholar