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FIB Sample Preparation for In Depth EDS Analysis

Published online by Cambridge University Press:  05 August 2019

Roberto Garcia ,
Fred A. Stevie  and
Lucille Giannuzzi
Roberto Garcia
Affiliation:
Analytical Instrumentation Facility, North Carolina State University, Raleigh, NC, USA.
Fred A. Stevie*
Affiliation:
Analytical Instrumentation Facility, North Carolina State University, Raleigh, NC, USA.
Lucille Giannuzzi
Affiliation:
EXpressLO LLC, Lehigh Acres, FL, USA.
*
*Corresponding author: fred_stevie@ncsu.edu

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 914 - 915
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]“Introduction to Focused Ion Beams”, ed. Giannuzzi, LA and Stevie, FA (Springer, NY).Google Scholar
[2]Stevie, FA, Vartuli, CB, Giannuzzi, LA, Shofner, TL, Brown, SR, Rossie, B, Hillion, F, Mills, RH, Antonell, M, Irwin, RB, and Purcell, BM, Surface and Interface Analysis 31 (2001), p. 345-351.Google Scholar
[3]Garcia, R, Liu, Y, Stevie, FA, Microsc. Microanal. 22 (Suppl 3) (2016) p. 138-139.Google Scholar
[4]Vartuli, CB, Stevie, FA, Bindell, JB, Shofner, TL, and Purcell, BM, Microscopy and Microanalysis Proceedings 5, Supplement 2 (1999) p. 896-897.Google Scholar
[5]This work was performed in part at the Analytical Instrumentation Facility (AIF) at North Carolina State University, which is supported by the State of North Carolina and the National Science Foundation (award number ECCS-1542015). The AIF is a member of the North Carolina Research Triangle Nanotechnology Network (RTNN), a site in the National Nanotechnology Coordinated Infrastructure (NNCI).Google Scholar