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Fast Fabrication of Micropillars for Micromechanical Testing Using a Combined fs-Laser – FIB/SEM Approach

Published online by Cambridge University Press:  22 July 2022

Tim Schubert ,
Fang Zhou ,
Renato Pero ,
Nicolas Randall ,
Timo Bernthaler  and
Gerhard Schneider
Tim Schubert*
Affiliation:
Aalen University – Materials Research Institute, Aalen, Baden-Wuerttemberg, Germany
Fang Zhou
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Baden-Wuerttemberg, Germany
Renato Pero
Affiliation:
Alemnis AG, Thun, Switzerland
Nicolas Randall
Affiliation:
Alemnis AG, Thun, Switzerland
Timo Bernthaler
Affiliation:
Aalen University – Materials Research Institute, Aalen, Baden-Wuerttemberg, Germany
Gerhard Schneider
Affiliation:
Aalen University – Materials Research Institute, Aalen, Baden-Wuerttemberg, Germany
*
*Corresponding author: Tim.Schubert@hs-aalen.de

Abstract

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Type
Ultrashort Pulse Lasers: Microscopy, Simulations, and Material Interactions
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 892 - 895
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Copyright
Copyright © Microscopy Society of America 2022

References

Barnett, R., Mueller, S. and Hiller, S. et al. , Optics and Lasers in Engineering 127 (2020). doi:10.1016/j.optlaseng.2019.105941CrossRefGoogle Scholar
Volkenandt, T., Laquerre, A. et al. , Microscopy and Microanalysis 22 (2016), doi:10.1017/S143192761600180X.CrossRefGoogle Scholar