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Extract High Resolution 3D Quantitative Elemental Map Using a Combined HAADF-STEM and EDS Tomography

Published online by Cambridge University Press:  30 July 2020

Yu Yuan ,
Nicolas Brodusch ,
Frédéric Voisard ,
Boris Nijikovsky ,
Audrey Moores  and
Raynald Gauvin
Yu Yuan
Affiliation:
McGill University, Montreal, Quebec, Canada
Nicolas Brodusch
Affiliation:
McGill University, Montreal, Quebec, Canada
Frédéric Voisard
Affiliation:
McGill University, Montreal, Quebec, Canada
Boris Nijikovsky
Affiliation:
Facility for Electron Microscopy Research, McGill University, Montreal, Quebec, Canada
Audrey Moores
Affiliation:
McGill University, Montreal, Quebec, Canada
Raynald Gauvin
Affiliation:
McGill University, Montreal, Quebec, Canada

Abstract

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Type
FIB-SEM Technology and Electron Tomography for Materials Science and Engineering
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1854 - 1855
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Copyright
Copyright © Microscopy Society of America 2020

References

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