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Evaluation of Strategies to Increase the Spatial Resolution of X-Ray Mapping in the FE-SEM of Low Concentration in Sub-Micron microstructures

Published online by Cambridge University Press:  26 July 2009

P Hovington
Affiliation:
Hydro-Quebec Research Institute,Canada
P T-Pinard
Affiliation:
McGill University,Canada
M Lagacé
Affiliation:
Hydro-Quebec Research Institute,Canada
D Thibeault
Affiliation:
Hydro-Quebec Research Institute,Canada
R Gauvin
Affiliation:
McGill University,Canada
D Drouin
Affiliation:
University of Sherbrooke,Canada

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2009