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Evaluation method of image resolution for the aberration-corrected STEM

Published online by Cambridge University Press:  30 July 2021

Yasuhiko Sugigaki
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Yoshifumi Taniguchi
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Yudai Kubo
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Kuniyasu Nakamura
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Susumu Koyama
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Mitsugu Sato
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan

Abstract

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Type
Advances in Analytical STEM-in-SEM
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

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