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Energy-Filtered Imaging: A Tutorial

Published online by Cambridge University Press:  02 July 2020

J. Bentley
J. Bentley*
Affiliation:
Metals & Ceramics Division, Oak Ridge National Laboratory, PO Box 2008, Oak Ridge, TN37831-6376
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Extract

Over the several years that imaging energy filters have been available commercially, numerous and wide-ranging applications have demonstrated elemental mapping with a resolution approaching 1 nm. A few reports have even shown resolutions <0.4 nm. Elemental mapping by energy-filtered transmission electron microscopy (EFTEM) is clearly an attractive and powerful tool, but some aspects of the techniques can be complex, with many pitfalls awaiting the unwary. This tutorial aims to cover some practical aspects of elemental mapping by EFTEM. It is based largely on the author's work at the ORNL SHaRE User Facility, where EFTEM research has been performed since 1994 with a Gatan imaging filter (GIF) interfaced to a Philips CM30T operated at 300 kV with a LaBa cathode.120 Most of the applications have been to metals and ceramics, emphasizing interfacial segregation and precipitation.

For quantitative composition mapping by EFTEM a number of interrelated parameters [field of view, resolution (δ),

Type
Energy-Filtered Imaging
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 1186 - 1187
Copyright
Copyright © Microscopy Society of America

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References

1. Bentley, J. and Kenik, E.A., Proc. Annual MSA Meeting 52 (1994) 1000.Google Scholar

2. Bentley, J. et al., Proc. Microscopy and Microanalysis 1995, 268.Google Scholar

3. Hall, E.L. and Bentley, J., Proc. Microscopy and Microanalysis 1995, 260.Google Scholar

4. Bentley, J. et al., Proc. Microscopy and Microanalysis 1996, 542.Google Scholar

5. Bentley, J. et al., Proc. EMAG95, Inst. Phys. Conf. Ser. 147, Bristol, IOP (1995) 187.Google Scholar

6. Bentley, J., Microsc. Microanal. 3 (Suppl 2: Proceedings) (1997) 533.Google Scholar

7. Bentley, J. et al., Microsc. Microanal. 3 (Suppl 2: Proceedings) (1997) 975.Google Scholar

8. Hall, E.L. and Bentley, J., Mat. Res. Soc. Symp. Proc. 458 (1997) 121.CrossRefGoogle Scholar

9. Bentley, J. and Anderson, I.M., Proc. Microscopy and Microanalysis 1996, 532.Google Scholar

10. Anderson, I.M. and Bentley, J., Mat. Res. Soc. Symp. Proc. 458 (1997) 81.CrossRefGoogle Scholar

11. Anderson, I.M. and Bentley, J., Microsc. Microanal. 3 (Suppl 2: Proceedings) (1997) 931.Google Scholar

12. Bentley, J. et al., Mat. Res. Soc. Symp. Proc. 517 (1998) 205.CrossRefGoogle Scholar

13. Wittig, J.E. et al., Mat. Res. Soc. Symp. Proc. 517 (1998) 211CrossRefGoogle Scholar

14. Evans, N.D. and Bentley, J., Proc. Microscopy and Microanalysis 1996, 544.Google Scholar

15. Bentley, J., Microsc. Microanal. 4 (Suppl 2: Proceedings) (1998) 158.Google Scholar

16. Bentley, J. et al., Microsc. Microanal. 5 (Suppl 2: Proceedings) (1999) 136; ibid 634.Google Scholar

17. Bentley, J., these proceedings.Google Scholar

18. Wang, Z.L., Bentley, J. and Evans, N.D., J. Phys. Chem. B 103 (1999) 751.CrossRefGoogle Scholar

19. Wang, Z.L., Bentley, J. and Evans, N.D., Microsc. Microanal. 5 (Suppl 2: Proceedings) (1999) 102.Google Scholar

20. Bentley, J., Walter, K.C. and Evans, N.D., these proceedings.Google Scholar

21. Research at the Oak Ridge National Laboratory (ORNL) SHaRE User Facility sponsored by the Division of Materials Sciences and Engineering, U.S. Department of Energy, under contract DE-AC05-96OR22464 with Lockheed Martin Energy Research Corp. Thanks to my many collaborators but especially to Drs. Ian Anderson, Ray Carpenter, Neal Evans, Ernie Hall, Ed Kenik, Matt Libera, Bruce Pint, Phil Rice, Renu Sharma, Z.L. Wang and Jim Wittig.Google Scholar