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Electron Lithography In Glasses by STEM

Published online by Cambridge University Press:  19 July 2003

Nan Jiang
Affiliation:
Department of Physics and Astronomy, Arizona State University, Tempe AZ 85287-1504
Gary Hembree
Affiliation:
Department of Physics and Astronomy, Arizona State University, Tempe AZ 85287-1504
John C. H. Spence
Affiliation:
Department of Physics and Astronomy, Arizona State University, Tempe AZ 85287-1504

Abstract

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Abstract
Copyright
Copyright © Microscopy Society of America 2003