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Electron Counted STEM-EELS Spectroscopy Optimized for low kV (< 80 kV) via Hybrid Pixel Detection

Published online by Cambridge University Press:  22 July 2022

Liam Spillane ,
Roberto dos Reis ,
Anahita Pakzad  and
Ray D. Twesten
Liam Spillane*
Affiliation:
Gatan Inc., Pleasanton, CA, USA
Roberto dos Reis
Affiliation:
Northwestern University, Department of Materials Science and Engineering, Evanston, IL, USA NUANCE Center, Northwestern University, Evanston, IL, USA
Anahita Pakzad
Affiliation:
Gatan Inc., Pleasanton, CA, USA
Ray D. Twesten
Affiliation:
Gatan Inc., Pleasanton, CA, USA
*
*Corresponding author: liam.spillane@ametek.com

Abstract

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Type
Electron Microscopy of Beam Sensitive Samples: The Trials and Tribulations of Electron-beam Sample Interactions
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 2226 - 2228
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Copyright
Copyright © Microscopy Society of America 2022

References

Hart, JL et al. , Sci Rep 7 (2017), p. 8243.Google Scholar
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Komsa, H-P et al. , Phys. Rev. Lett. 109(3) (2021), p. 035503.Google Scholar
Dectris detecting the future, https://www.dectris.com (accessed February 22, 2022).Google Scholar
RdR acknowledges the support of the EPIC facility of Northwestern University's NUANCE Center, which has received support from the SHyNE Resource (NSF ECCS-2025633), the IIN, and Northwestern's MRSEC program (NSF DMR-1720139). This research was supported in part through the computational resources and staff contributions provided for the Quest high performance computing facility at Northwestern University which is jointly supported by the Office of the Provost, the Office for Research, and Northwestern University Information Technology.Google Scholar