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A EELS Sub Nanometer Investigation of the Dielectric Gate Stack for the Realization of InGaAs Based MOSFET Devices

Published online by Cambridge University Press:  26 July 2009

P Longo ,
MC Holland ,
GW Paterson ,
AJ Craven  and
IG Thayne
P Longo
Affiliation:
University of Glasgow,United Kingdom
MC Holland
Affiliation:
University of Glasgow,United Kingdom
GW Paterson
Affiliation:
University of Glasgow,United Kingdom
AJ Craven
Affiliation:
University of Glasgow,United Kingdom
IG Thayne
Affiliation:
University of Glasgow,United Kingdom

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 454 - 455
Copyright
Copyright © Microscopy Society of America 2009