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Determination of Strain Relaxation at the Free Surfce of Strained-SiGe Film Using Convergent Beam Electron Diffraction

Published online by Cambridge University Press:  01 August 2005

S-I Baik  and
Y-W Kim
S-I Baik
Affiliation:
Seoul National University
Y-W Kim
Affiliation:
Seoul National University

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 1784 - 1785
Copyright
© 2005 Microscopy Society of America