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Demonstration of High Efficiency Diffractive Optics for Electrons Fabricated with Ion Beam Gas-Assisted Etching

Published online by Cambridge University Press:  05 August 2019

Cameron Johnson  and
Ben McMorran
Cameron Johnson*
Affiliation:
Department of Physics, University of Oregon, Eugene, OR, USA.
Ben McMorran
Affiliation:
Department of Physics, University of Oregon, Eugene, OR, USA.
*
*Corresponding author: cwj@uoregon.edu

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 922 - 923
Copyright
Copyright © Microscopy Society of America 2019 

References

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[8]Nanofabrication and microscopy were performed at the Center for Advanced Materials Characterization in Oregon (CAMCOR); the authors would like to thank Robert Fischer and Joshua Razink for their help. This material is based upon work supported by the National Science Foundation under No. 1607733, as well as the National Science Foundation Graduate Research Fellowship Program under Grant No. 1309047. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.Google Scholar